Figure \(\PageIndex{1}\) portrays a standard capacitive MEMS sensor that illustrates the basic principles, where the capacitor plates of area A are separated by the distance d, and the voltage V is de...Figure \(\PageIndex{1}\) portrays a standard capacitive MEMS sensor that illustrates the basic principles, where the capacitor plates of area A are separated by the distance d, and the voltage V is determined in part by the voltage divider formed by the source resistance \(R_s\) and the amplifier input resistance R.
