This page explores Chapter 6 of an introduction to Micro-Electromechanical Systems (MEMS), covering motors, generators, and sensors, with a focus on electrostatic actuators. It discusses the principle...This page explores Chapter 6 of an introduction to Micro-Electromechanical Systems (MEMS), covering motors, generators, and sensors, with a focus on electrostatic actuators. It discusses the principles of force generation in capacitors, optimization of actuator design, and the efficiency of rotary MEMS motors and dielectric actuators. Key concepts include torque and power calculations, voltage management in motor design, and limitations like electrical breakdown.
This page explores various magneto-acoustic and electro-acoustic devices, highlighting loudspeakers, magnetostrictive devices, and the dual role of electro-acoustic components as actuators and sensors...This page explores various magneto-acoustic and electro-acoustic devices, highlighting loudspeakers, magnetostrictive devices, and the dual role of electro-acoustic components as actuators and sensors. It also discusses opto-acoustic-wave transducers and their role in signal processing, as well as the use of shear waves for filters and transformers. High-Q resonators are noted for their construction from quartz, owing to its excellent mechanical properties.
